The semiconductor manufacturing equipment (SME) market is projected to experience substantial growth over the next five years, driven by the anticipated increase in semiconductor chip sales from $600 billion in 2022 to $1 trillion in 2030. Sensors are at the heart of the advanced lithography systems used in chip manufacturing.
sensitive techniques, which not only enhance process yield but also minimize waste and optimize plant efficiency. To achieve the sub-micron and nanometer precision essential for mass producing integrated circuits (ICs), these systems rely on thousands of sensors for monitoring and controlling position, temperature, energy, and motion. Overall system performance relies on the precise and repeatable performance of each individual sensor. Advanced algorithms interpret large volumes of sensor data and coordinate the necessary tweaks in very minor but detailed ways using thousands of actuators.
micromodule (µModule®) technology to provide a high- performance, miniaturized, analog-to-digital data acquisition (DAQ) solution for monitoring and controlling lithography semiconductor manufacturing subsystems to meet the production challenges faced by wafer fabricators and integrated device manufacturers. Application background The continued miniaturization of semiconductors is driving performance gains in everything from smartphones to supercomputers, and the processing requirements of generative artificial intelligence (GenAI), quantum computing, IoT,
Manufacturing the complex, high-performance—and ever
smaller—semiconductor chips is largely reliant on highly precise and sensitive lithography processes that are instrumental in printing intricate patterns onto silicon wafers and other substrates used in chip manufacturing. Advanced lithography systems employ extremely accurate and
Analog Devices, Inc. (ADI) leverages its signal chain
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