such as those monitoring wafer stage alignment or environmental conditions. Power supply noise can directly impact the precision and reliability of lithography system measurements, but the ADAQ7768- 1 was designed to operate with a single power supply, simplifying system design and reducing the need for additional external power management circuits. The power management design minimizes power supply ripple and noise, which is critical for maintaining the high accuracy of the integrated low noise 24-bit ADC and the signal conditioning chain. The ADAQ7768-1 is designed to operate using a single regulated 5.3 V input, with minor variation of input voltage range between 5.1 V and 5.5 V. The module includes internal LDOs to provide clean and stable power to its various internal subsystems. The ADAQ7768-1 reduces design complexity by eliminating the need for designers to source and calibrate individual signal chain components, helping to streamline prototyping and testing phases, thereby shortening the time-to-market. Product designers can utilize ADI's EVAL-ADAQ7768-1 evaluation board (Figure 3) to
simplify prototyping, accelerate development, and help validate precision data acquisition designs that integrate the ADAQ7768-1 into their systems. This is critical in ensuring systems perform as expected in sub-nanometer positioning and alignment processes. The evaluation board provides a fully functional platform to test the ADAQ7768-1 with pre-assembled signal chain components and offers plug- and-play operation with standard test equipment or microcontrollers. Designers can evaluate and optimize the performance of their designs, test under various environmental conditions test differing sensor types and signal sources to determine optimal input signal conditioning.
Conclusion Advanced lithography systems, which rely on thousands of sensors for monitoring and control, are crucial for manufacturing smaller and more powerful semiconductors. Sensors play a pivotal role in actuator control, providing real-time feedback and ensuring precision and yield in semiconductor manufacturing. ADI’s ADAQ7768-1 data acquisition system simplifies and enhances precision measurement and control systems, integrating signal conditioning, conversion, and processing blocks. Its compact size, high accuracy, and ease of use make it a valuable tool for developing next- generation lithography equipment that demands extreme precision and reliability.
Figure 3: ADI's evaluation board for prototyping and testing applications built around the ADAQ7768-1 data acquisition solution. (Image source: Analog Devices, Inc.)
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