How SCARA, six-axis, and cartesian pick-and-place robotics optimize and streamline electronics manufacturing processes
More specifically, some industry-typical SCARAs deliver repeatability to within ±20 μm on linear degrees of freedom (DOFs) and ±0.01° on the angular axis — as well as direct-drive options for smooth transport of thin and relatively brittle wafers. While payloads can be limited to 10 kg or lighter for many SCARAs, that’s rarely an issue in semiconductor applications — though is certainly a consideration for the related field of solar-panel production. SCARAs pair well with conveyors used in semiconductor processing stations as well as wafer carousels (also called rotary tables) designed to facilitate the addition of components or features to multiple circuit boards at a time. Six-axis robotics in electronics manufacturing Industrial-grade articulated robots feature multiple rotary joints to manipulate objects through two to 10 DOFs. The most common articulated-robot format is the six-axis robot. Semiconductor processes necessitating cleanroom settings benefit from six-axis robots that are suitably rated as well as compact to consume less power and less of the premium cleanroom real estate. Variations
abound to deliver the speed and accuracy needed for high- throughput handling and assembly. The servomotors to drive the robots’ joints are similar to those found in other robot types, but six- axis robots are far more likely to pair these motors with strain-wave or cycloidal gearing. Like SCARAs, six-axis robots also pair well with conveyors used in semiconductor processing stations.
SCARA robotics in electronics manufacturing For decades, SCARAs have remained the gold standard for semiconductor wafer processing, handling, and assembly tasks including: ■ Deposition and etching
■ Thermal processing ■ Reticle processing ■ Circuit board assembly ■ Testing and metrology
After all, SCARAs offer high speeds throughout their cylindrically shaped 360° reach — often capable of executing pick-and-place tasks far faster (and sometimes more precisely) than comparable six-axis and cartesian solutions.
Figure 7: SCARA robots execute pick-and-place wafer handling and processing tasks quickly and precisely. (Image source: Dreamstime)
Figure 8: This six-axis articulated robot is available in ISO 5 (class 100) cleanroom models. (Image source: Denso Robotics)
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